The chemical vapor deposition process is very severe for pump components. It is the reason for what; MPA Industrie has developed relevant technique to pump effluent from CVD process. One consists of modifying liquid ring pump system to be adapted to the CVD. Generally this system is coupled with a scrubber station.
The over technique is based on dry pump mainly adapted for chemical process.
For low pressure application, roots can be added.
Designer and Manufacturer of CVD/CVI Solutions
