SiC coated waffer carrier for MOCVD system dedicated to LED production is a growing market due to the world wide expansion of LED demand. MPA Industrie R1200 SiC CVD unit has been developed for this particular business. Already many systems have been delivered overseas to reputed graphite manufacturers. MPA Industrie is able to coat with accuracy the highest MOCVD carriers with dimensions up to 720 mm diameter. The system is versatile and be converted to many other SiC coating applications on graphite parts.
Tantalum carbide coating can be proposed as an option. R1600 SiC CVD system exists for bigger parts.
MPA Industrie R1200 SiC CVD system is also available for CVI operations including pyrolytic carbon and boron nitride for CMC production.