Case study

MPA Industrie proposes design and build of CVD reactors aimed to Chemical Vapor Deposition for coatings, infiltration, graphite purification, and fluoride Ion cleaning process.

These reactors operate from vacuum until atmospheric pressure, in a wide range of temperatures from 500 to 2300°C. The diameter of these reactors is included between 100 mm and 3000 mm for the useful zone.

Most of the case for CVD applications operates under vacuum from 10-2 mbar to several hundred mbar.